JPS6334266Y2 - - Google Patents
Info
- Publication number
- JPS6334266Y2 JPS6334266Y2 JP2124283U JP2124283U JPS6334266Y2 JP S6334266 Y2 JPS6334266 Y2 JP S6334266Y2 JP 2124283 U JP2124283 U JP 2124283U JP 2124283 U JP2124283 U JP 2124283U JP S6334266 Y2 JPS6334266 Y2 JP S6334266Y2
- Authority
- JP
- Japan
- Prior art keywords
- alignment
- semiconductor wafer
- photomask
- alignment marks
- marks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 description 22
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000010354 integration Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2124283U JPS59155734U (ja) | 1983-02-15 | 1983-02-15 | 位置合わせマ−ク |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2124283U JPS59155734U (ja) | 1983-02-15 | 1983-02-15 | 位置合わせマ−ク |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59155734U JPS59155734U (ja) | 1984-10-19 |
| JPS6334266Y2 true JPS6334266Y2 (en]) | 1988-09-12 |
Family
ID=30152369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2124283U Granted JPS59155734U (ja) | 1983-02-15 | 1983-02-15 | 位置合わせマ−ク |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59155734U (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5421213A (en) | 1990-10-12 | 1995-06-06 | Okada; Kazuhiro | Multi-dimensional force detector |
| US6314823B1 (en) | 1991-09-20 | 2001-11-13 | Kazuhiro Okada | Force detector and acceleration detector and method of manufacturing the same |
| US6282956B1 (en) | 1994-12-29 | 2001-09-04 | Kazuhiro Okada | Multi-axial angular velocity sensor |
-
1983
- 1983-02-15 JP JP2124283U patent/JPS59155734U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59155734U (ja) | 1984-10-19 |
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